The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Mar. 31, 2009
Applicants:
Nils Dieckmann, Huettlingen, DE;
Damian Fiolka, Oberkochen, DE;
Inventors:
Nils Dieckmann, Huettlingen, DE;
Damian Fiolka, Oberkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 27/28 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70216 (2013.01); G02B 27/281 (2013.01); G02B 27/286 (2013.01); G03F 7/70091 (2013.01); G03F 7/70566 (2013.01);
Abstract
The disclosure relates to an optical system, such as an illumination system or a projection objective of a microlithographic projection exposure apparatus, including such an optical system having a polarization-influencing optical arrangement which permits enhanced flexibility in affording a desired polarization distribution.