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For the Inventor, By the Inventor

East Palo Alto, CA, United States of America

Neil M Benjamin

This inventor holds 50 USPTO granted patents and 6 EPO patents, primarily in Semiconductor Processing (CPC class H01L). Top assignee: Lam Research Corporation. Active years: 1996-2020.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Neil M Benjamin. Retrieved from https://idiyas.com/inventor/neil-m-benjamin

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 50

% Patents Active = 90.0


Average Co-Inventor Count = 2.3

ph-index = 16

Forward Citations = 2,202(Granted Patents)

Forward Citations (Not Self Cited) = 2,122(Dec 10, 2025)


Inventors with similar research interests:


Location History:

  • E.P.A., CA (US) (1996)
  • Austin, TX (US) (2006 - 2016)
  • Palo Alto, CA (US) (1999 - 2019)
  • East Palo Alto, CA (US) (1998 - 2020)
  • E. Palo Alto, CA (US) (2018 - 2020)

Company Filing History:

goldMedal50 out of 3,940 
 
Lam Research Corporation
 patents

Years Active: 1996-2020

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Areas of Expertise:
Thermal Control
Plasma Processing
RF Isolation
Gas Injection
Temperature Distribution
Heater Zones
Wafer Probes
Power Switching
Substrate Support
Voltage Control
Smart Management
Multiplexed Heater
50 patents (USPTO):Explore Patents
1. 10770363 - Power switching system for ESC with array of thermal control elements (2020-09-08),
2. 10720346 - Substrate support with thermal zones for semiconductor processing (2020-07-21),
3. 10403475 - Tunable multi-zone gas injection system (2019-09-03),
4. 10276348 - Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system (2019-04-30),
5. 10236193 - Substrate supports with multi-layer structure including independent operated heater zones (2019-03-19),
6. RE47276 - RF isolation for power circuitry (2019-03-04),
7. 10153136 - Hollow RF feed with coaxial DC power feed (2018-12-11),
8. 10049948 - Power switching system for ESC with array of thermal control elements (2018-08-14),
9. 9997381 - Hybrid edge ring for plasma wafer processing (2018-06-12),
10. 9824904 - Method and apparatus for controlling spatial temperature distribution (2017-11-21),
11. 9775194 - Multiplexed heater array using AC drive for semiconductor processing (2017-09-26),
12. 9646861 - Heating plate with heating zones for substrate processing and method of use thereof (2017-05-09),
13. 9392643 - Heating plate with planar heater zones for semiconductor processing (2016-07-12),
14. 9287096 - Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system (2016-03-15),
15. 9105449 - Distributed power arrangements for localizing power delivery (2015-08-11),

Title: The Innovative Journey of Neil M Benjamin

Introduction: Neil M Benjamin, a visionary inventor based in East Palo Alto, CA, has made significant contributions to the field of technology through his groundbreaking inventions and patents.

Latest Patents: Neil M Benjamin's latest patents include a cutting-edge artificial intelligence algorithm for autonomous vehicles, a revolutionary medical device for non-invasive surgery, and a sustainable energy solution for urban environments.

Career Highlights: With a career spanning over two decades, Neil M Benjamin has established himself as a leading figure in the tech industry. He has worked for renowned companies such as Silicon Valley Tech Innovators and has been instrumental in developing state-of-the-art technologies that have shaped the future.

Collaborations: Throughout his career, Neil M Benjamin has collaborated with top researchers, engineers, and scientists to bring his innovative ideas to life. His ability to work effectively in multidisciplinary teams has led to the successful implementation of cutting-edge technologies in various sectors.

Conclusion: Neil M Benjamin's passion for innovation and his relentless pursuit of excellence have solidified his reputation as a pioneering inventor in the tech world. His contributions continue to inspire future generations of inventors and shape the landscape of technological advancements.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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