Cupertino, CA, United States of America

Nader Shamma


Average Co-Inventor Count = 4.4

ph-index = 8

Forward Citations = 885(Granted Patents)


Company Filing History:


Years Active: 2016-2025

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23 patents (USPTO):

Title: Innovator Spotlight: Nader Shamma

Introduction:

Nader Shamma is a prolific inventor based in Cupertino, CA, with a notable portfolio of 17 patents. His groundbreaking work in semiconductor device manufacturing has revolutionized the industry and set new standards for efficiency and precision.

Latest Patents:

One of Shamma's latest patents involves the development of tin oxide films in semiconductor device manufacturing. By selectively etching tin oxide films on a semiconductor substrate in the presence of silicon, carbon, or carbon-containing materials, Shamma has significantly improved etch selectivity. This innovation showcases his expertise in enhancing the performance of semiconductor devices through novel processing techniques.

Another patent by Shamma focuses on eliminating the yield impact of stochastics in lithography. His methods and apparatuses for aspect ratio dependent deposition and aspect ratio independent etching on lithographically patterned substrates have been instrumental in reducing variation in feature depths and aspect ratios. This advancement is crucial for maintaining consistency in feature formation post-lithography processes.

Career Highlights:

Shamma has made significant contributions to the field of semiconductor technology through his work at esteemed companies such as Lam Research Corporation and Novellus Systems Incorporated. His expertise in developing cutting-edge manufacturing processes has earned him recognition as a leading innovator in the industry.

Collaborations:

Throughout his career, Shamma has collaborated with top professionals in the field, including Richard Stephan Wise and Jengyi Yu. Their collective efforts have led to the creation of innovative solutions that address key challenges in semiconductor manufacturing.

Conclusion:

In conclusion, Nader Shamma's inventive spirit and technical acumen have positioned him as a trailblazer in the semiconductor industry. His patents and collaborations underscore his commitment to driving technological advancements that shape the future of semiconductor device manufacturing.

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