The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Mar. 21, 2019
Lam Research Corporation, Fremont, CA (US);
Samantha Tan, Fremont, CA (US);
Jengyi Yu, San Ramon, CA (US);
Richard Wise, Los Gatos, CA (US);
Nader Shamma, Cupertino, CA (US);
Yang Pan, Los Altos, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Methods of and apparatuses for processing substrates having carbon-containing material using atomic layer etch and selective deposition are provided. Methods involve exposing a carbon-containing material on a substrate to an oxidant and igniting a first plasma to modify a surface of the substrate and exposing the modified surface to a second plasma at a bias power to remove the modified surface. Methods also involve selectively depositing a second carbon-containing material onto the substrate using a precursor having a chemical formula of CH, where x and y are integers greater than or equal to 1. ALE and selective deposition may be performed without breaking vacuum.