Location History:
- Kumamoto-Ken, JP (2003)
- Nirasaka, JP (2009)
- Nirasaki, JP (2009 - 2014)
- Miyagi, JP (2017 - 2024)
Company Filing History:
Years Active: 2003-2025
Title: Michishige Saito: Innovator in Substrate Processing Technology
Introduction
Michishige Saito is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 17 patents. His work focuses on developing advanced technologies that enhance the efficiency and effectiveness of substrate support systems.
Latest Patents
Among his latest patents, Saito has developed a substrate support and substrate processing apparatus. This innovative substrate support comprises a base with a first flow path that opens on the bottom surface at the central portion. Surrounding this first flow path is a second flow path, also opening on the bottom surface. Additionally, there are at least one third flow path and one fourth flow path, which communicate with the first and second flow paths, respectively. These features are designed to optimize substrate processing. Another notable patent is a stage and substrate processing apparatus that includes a first member made of a material with a density of 5.0 g/cm³ or less, and a second member with specific thermal properties. This design incorporates a flow passage for a temperature control medium, enhancing the performance of substrate processing.
Career Highlights
Saito is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to push the boundaries of substrate processing technology. His innovative designs and patents have contributed to advancements in the field, making him a respected figure among his peers.
Collaborations
Saito has collaborated with notable coworkers, including Tetsuo Yoshida and Shota Kaneko. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Michishige Saito's contributions to substrate processing technology are noteworthy, with a strong portfolio of patents that reflect his expertise and innovative spirit. His work continues to influence the industry and pave the way for future advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.