The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2025
Filed:
Jun. 03, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2005.12); H01L 21/683 (2005.12); H01L 21/687 (2005.12);
U.S. Cl.
CPC ...
H01J 37/32724 (2012.12); H01L 21/68757 (2012.12); H01J 2237/2007 (2012.12); H01L 21/6831 (2012.12);
Abstract
A stage includes a first member made of a material having a density of 5.0 g/cmor less, and a second member joined to the first member. The second member is made of a material having a linear expansion coefficient of 5.0×10/K or less and a thermal conductivity of 100 W/mK or more. A flow passage for a temperature control medium is formed in at least one of the first member and the second member.