Masatoshi Deguchi

Title: The Innovative Contributions of Masatoshi Deguchi

Introduction: Masatoshi Deguchi, an accomplished inventor based in Kumamoto, Japan, has made significant strides in the fields of semiconductor technology and materials science. With a remarkable portfolio of 18 patents, Deguchi continues to push the boundaries of innovation and develop advanced methodologies for wafer processing and joining systems.

Latest Patents: Among his latest contributions to the field are two notable patents focusing on separation methods and joining systems. The first patent, related to a separation method, describes a detailed process where a superposed wafer is separated into a processing target wafer and a supporting wafer while being heated. The method involves the removal of adhesive on the joint surface by applying an organic solvent, followed by the removal of an oxide film using acetic acid. An inspection of the joint surface is conducted, leading to the final removal of the adhesive and oxide film based on the inspection results.

The second patent emphasizes an innovative joining method and system, which comprises an adhesive coating operation, an adhesive removing operation, and a joining operation. This process allows for the effective pressing and joining of a target substrate and a support substrate, ensuring that the adhesive on the outer peripheral portion is removed, thereby facilitating a successful bond.

Career Highlights: Masatoshi Deguchi's career has been marked by his impressive tenure at notable companies, including Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His experiences in these organizations have equipped him with the knowledge to develop cutting-edge technologies that are crucial in the semiconductor manufacturing process.

Collaborations: Throughout his career, Deguchi has collaborated with various professionals in the industry, including notable coworkers such as Akihiro Fujimoto and Masatoshi Shiraishi. These collaborations have fostered a creative environment that has led to the birth of pioneering inventions and advancements in technology.

Conclusion: Masatoshi Deguchi's contributions to the fields of wafer separation and joining systems are notable examples of innovation in action. With 18 patents under his name, Deguchi's work exemplifies the impact of relentless pursuit of knowledge in driving technological advancements forward. His collaborations and career experiences continue to inspire the next generation of inventors.