The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Nov. 18, 2011
Masatoshi Deguchi, Kumamoto, JP;
Hideo Funakoshi, Koshi, JP;
Toshichika Takei, Koshi, JP;
Norifumi Sato, Koshi, JP;
Wataru Kiyota, Koshi, JP;
Daisuke Ishimaru, Koshi, JP;
Shinichi Machidori, Koshi, JP;
Ikuo Sunaka, Koshi, JP;
Shigenori Kamei, Koshi, JP;
Masatoshi Deguchi, Kumamoto, JP;
Hideo Funakoshi, Koshi, JP;
Toshichika Takei, Koshi, JP;
Norifumi Sato, Koshi, JP;
Wataru Kiyota, Koshi, JP;
Daisuke Ishimaru, Koshi, JP;
Shinichi Machidori, Koshi, JP;
Ikuo Sunaka, Koshi, JP;
Shigenori Kamei, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate treatment system includes a plurality of treatment apparatuses, a position adjustment apparatus adjusting a center position of the substrate, a substrate transfer apparatus transferring the substrate to the treatment apparatuses and the position adjustment apparatus, and a control unit controlling operations of the apparatuses. The substrate transfer apparatus includes an arm part curved along a peripheral edge portion of the substrate with a radius of curvature larger than a radius of the substrate, and a holding part projecting inward from the arm part and holding a rear surface of the substrate. The position adjustment apparatus includes a mounting table which holds a central portion of the rear surface of the substrate and is rotatable and horizontally movable. The control unit controls the mounting table such that the center position of the substrate held on the mounting table is aligned with a center position of the arm part.