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Tokyo Electron Kyushu Limited

USPTO Granted Patents = 85

Forward Citations = 3,251

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105 inventors (with patents filed for the assignee):

Masami Akimoto (17 out of 103 patents)

Kiyohisa Tateyama (15 out of 67 patents)

Akihiro Fujimoto (12 out of 32 patents)

4. Takashi Takekuma (9 out of 18 patents)

5. Mitsuo Nishi (7 out of 11 patents)

6. Takayuki Tomoeda (7 out of 11 patents)

7. Hidetami Yaegashi (6 out of 40 patents)

8. Naruaki Iida (6 out of 46 patents)

9. Michiaki Matsushita (6 out of 15 patents)

10. Masafumi Nomura (6 out of 14 patents)

11. Shori Mokuo (6 out of 13 patents)

12. Shinzi Kitamura (6 out of 6 patents)

13. Takahide Fukuda (6 out of 7 patents)

14. Hiroyuki Matsukawa (6 out of 6 patents)

15. Masaaki Murakami (6 out of 6 patents)

Core Competencies:

Coating Film Formation

Substrate Processing

Resist Processing

Substrate Cleaning

Heat Treatment

Semiconductor Wafer Processing

Hydrophobic Treatment

Substrate Drying

Transfer Apparatus

Cleaning Method

Developing Resist Coated Substrate

Substrate Treatment System

85 patents: Sort by Forward Citations

1. 6063190 - Method of forming coating film and apparatus therefor (2000-05-16),

2. 6054181 - Method of substrate processing to form a film on multiple target objects (2000-04-25),

3. 6022185 - Substrate transferring device (2000-02-08),

4. 5965200 - Processing apparatus and processing method (1999-10-12),

5. 5964954 - Double-sided substrate cleaning apparatus and cleaning method using the (1999-10-12),

6. 5942035 - Solvent and resist spin coating apparatus (1999-08-24),

7. 5882426 - Method of cleaning a substrate by scrubbing (1999-03-16),

8. 5871584 - Processing apparatus and processing method (1999-02-16),

9. 5853803 - Resist processing method and apparatus (1998-12-29),

10. 5826130 - Apparatus and method for developing resist coated on substrate (1998-10-20),

11. 5826129 - Substrate processing system (1998-10-20),

12. 5817156 - Substrate heat treatment table apparatus (1998-10-06),

13. 5803932 - Resist processing apparatus having an interface section including two (1998-09-08),

14. 5779796 - Resist processing method and apparatus (1998-07-14),

15. 5762745 - Substrate processing apparatus (1998-06-09),

Tokyo Electron Kyushu Limited is a subsidiary of Tokyo Electron Limited, specializing in the manufacture and sale of semiconductor production equipment. With a focus on delivering innovative solutions, Tokyo Electron Kyushu strives to contribute to the advancement of the semiconductor industry. For more information, please visit their website.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

85 Patents

#1 in Tosu

#1,228 in Japan

#8,716 in the World

Tokyo Electron Kyushu Limited

Forward Citations = 3,251

105 inventors:

Masami Akimoto (17 out of 103 patents)

Kiyohisa Tateyama (15 out of 67 patents)

Akihiro Fujimoto (12 out of 32 patents)

4. Takashi Takekuma (9 out of 18 patents)

5. Mitsuo Nishi (7 out of 11 patents)

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