Inventors with similar research interests:
Location History:
- Tosu, JP (1997)
- Kikuchi-Gun, JP (2004)
- Kumamoto, JP (1993 - 2005)
- Kumamoto-ken, JP (1999 - 2007)
Company Filing History:
66 out of 10,295 
15 out of 85 
2 out of 52,711 
Years Active: 1993-2007
Areas of Expertise:
Title: Kiyohisa Tateyama: Innovator in Developing Methods and Apparatus
Introduction
Kiyohisa Tateyama, located in Kumamoto, Japan, is a prolific inventor known for his significant contributions to developing methods and apparatus. With a remarkable total of 67 patents to his name, Tateyama has established himself as a leading figure in the field of innovation, particularly within the semiconductor industry.
Latest Patents
Among his latest innovations, Tateyama has developed a cutting-edge method and apparatus for measuring resist concentration in developing solutions. This system features a concentration measuring unit that extracts part of the developing fluid from a blending tank to measure the resist concentration using absorption photometry. The detected concentration is then relayed to a control unit that effectively manages valves for a TMAH concentrate solution, a solvent pipe, and a drain pipe. This meticulous control ensures that the TMAH concentration corresponds accurately with the measured resist concentration value, achieving a consistent developing rate. As a result, even when the developing fluid is reused multiple times, uniformity in development is maintained, enhancing process efficiency and reliability.
Career Highlights
Tateyama has made a significant impact while working with notable companies such as Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His tenure at these organizations has been marked by a strong focus on innovation and excellence in technological advancements.
Collaborations
Throughout his career, Kiyohisa Tateyama has collaborated with esteemed professionals in the industry, including Kimio Motoda and Hideyuki Takamori. These collaborations have undoubtedly enriched his work, enabling significant advancements in the methodologies he developed.
Conclusion
In summary, Kiyohisa Tateyama's contributions to the field of developing methods and apparatus are invaluable. With his extensive patent portfolio and collaborative spirit, he continues to influence and advance the semiconductor sector. His work not only enhances development processes but also paves the way for future innovations in this critical industry.
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