3 Patents
#10 in Saga
#8,779 in Japan
Tokyo Electron Saga Kabushiki Kaisha
Forward Citations = 53
5 inventors:
5 inventors (with patents filed for the assignee):
Yuji Kamikawa (1 out of 84 patents)
Takanori Miyazaki (1 out of 13 patents)
Kiyohisa Tateyama (1 out of 67 patents)
4. Yasuhiro Sakamoto (1 out of 12 patents)
5. Hiroshi Sakurai (1 out of 1 patent)
3 patents:
#10 in Saga
#8,779 in Japan
5 inventors: