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Iwate-ken, Japan

Tokyo Electron Tohoku Limited

USPTO Granted Patents = 29

Forward Citations = 3,375

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51 inventors (with patents filed for the assignee):

Katsumi Ishii (3 out of 22 patents)

Tetsu Ohsawa (3 out of 8 patents)

Junichi Arami (2 out of 32 patents)

4. Kazuo Terada (2 out of 11 patents)

5. Toshiharu Nishimura (2 out of 14 patents)

6. Takenobu Matsuo (2 out of 21 patents)

7. Wataru Okase (2 out of 34 patents)

8. Hisashi Kikuchi (2 out of 6 patents)

9. Tsuyoshi Wakabayashi (2 out of 10 patents)

10. Kazunari Sakata (2 out of 13 patents)

11. Takashi Tanahashi (2 out of 14 patents)

12. Tetu Ohsawa (2 out of 4 patents)

13. Hitoshi Kato (1 out of 225 patents)

14. Masayuki Kitamura (1 out of 67 patents)

15. Masato Kadobe (1 out of 6 patents)

29 patents: Sort by Forward Citations

1. 6033215 - Heat treatment apparatus and heat treatment boat (2000-03-07),

2. 5862302 - Thermal processing apparatus having a reaction tube with transparent and (1999-01-19),

3. 5749723 - Heat treatment apparatus (1998-05-12),

4. 5688116 - Heat treatment process (1997-11-18),

5. 5677235 - Method for forming silicon film (1997-10-14),

6. 5655871 - Device for transferring plate-like objects (1997-08-12),

7. 5645391 - Substrate transfer apparatus, and method of transferring substrates (1997-07-08),

8. 5626456 - Transfer device (1997-05-06),

9. 5616264 - Method and apparatus for controlling temperature in rapid heat treatment (1997-04-01),

10. 5611863 - Semiconductor processing apparatus and cleaning method thereof (1997-03-18),

11. 5593608 - Temperature control method and apparatus for use in thermal processing (1997-01-14),

12. 5591269 - Vacuum processing apparatus (1997-01-07),

13. 5586880 - Heat treatment apparatus and heat treatment boat (1996-12-24),

14. 5575853 - Vacuum exhaust system for processing apparatus (1996-11-19),

15. 5562387 - Device for transferring plate-like objects (1996-10-08),

Tokyo Electron Tohoku Limited is a subsidiary of Tokyo Electron Limited, a global semiconductor manufacturing equipment company. Specializing in the development and manufacturing of semiconductor production equipment, Tokyo Electron Tohoku Limited contributes to advancing the semiconductor industry. Visit our website for more information and to explore our product portfolio.

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USPTO Data Jan 1 1976 - Dec 30 2025

29 Patents

#1 in Iwate-ken

#2,303 in Japan

#21,866 in the World

Iwate-ken, Japan

Tokyo Electron Tohoku Limited

Forward Citations = 3,375

51 inventors:

Katsumi Ishii (3 out of 22 patents)

Tetsu Ohsawa (3 out of 8 patents)

Junichi Arami (2 out of 32 patents)

4. Kazuo Terada (2 out of 11 patents)

5. Toshiharu Nishimura (2 out of 14 patents)

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