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Tokyo Electron Tohoku Limited

USPTO Granted Patents = 29

Forward Citations = 3,466

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51 inventors (with patents filed for the assignee):

Katsumi Ishii (3 out of 22 patents)

Tetsu Ohsawa (3 out of 8 patents)

Junichi Arami (2 out of 32 patents)

4. Kazuo Terada (2 out of 11 patents)

5. Toshiharu Nishimura (2 out of 14 patents)

6. Takenobu Matsuo (2 out of 21 patents)

7. Wataru Okase (2 out of 34 patents)

8. Hisashi Kikuchi (2 out of 6 patents)

9. Tsuyoshi Wakabayashi (2 out of 10 patents)

10. Kazunari Sakata (2 out of 13 patents)

11. Takashi Tanahashi (2 out of 14 patents)

12. Tetu Ohsawa (2 out of 4 patents)

13. Hitoshi Kato (1 out of 227 patents)

14. Masayuki Kitamura (1 out of 71 patents)

15. Masato Kadobe (1 out of 7 patents)

Core Competencies:

Heat Treatment

Thermal Processing

Silicon Film

Substrate Transfer

Temperature Control

Vacuum Processing

Plasma Processing

Wafer Container

Air Cleaning

Decompression

Notch Position Alignment

Reaction Tube

29 patents: Sort by Forward Citations

1. 6033215 - Heat treatment apparatus and heat treatment boat (2000-03-07),

2. 5862302 - Thermal processing apparatus having a reaction tube with transparent and (1999-01-19),

3. 5749723 - Heat treatment apparatus (1998-05-12),

4. 5688116 - Heat treatment process (1997-11-18),

5. 5677235 - Method for forming silicon film (1997-10-14),

6. 5655871 - Device for transferring plate-like objects (1997-08-12),

7. 5645391 - Substrate transfer apparatus, and method of transferring substrates (1997-07-08),

8. 5626456 - Transfer device (1997-05-06),

9. 5616264 - Method and apparatus for controlling temperature in rapid heat treatment (1997-04-01),

10. 5611863 - Semiconductor processing apparatus and cleaning method thereof (1997-03-18),

11. 5593608 - Temperature control method and apparatus for use in thermal processing (1997-01-14),

12. 5591269 - Vacuum processing apparatus (1997-01-07),

13. 5586880 - Heat treatment apparatus and heat treatment boat (1996-12-24),

14. 5575853 - Vacuum exhaust system for processing apparatus (1996-11-19),

15. 5562387 - Device for transferring plate-like objects (1996-10-08),

Company Overview

Tokyo Electron Tohoku Limited is a prominent player in the semiconductor manufacturing equipment sector, specializing in the development and production of advanced technologies for the fabrication of integrated circuits. The company focuses on providing innovative solutions that enhance the efficiency and performance of semiconductor production processes. Located in Esashi, Japan, it plays a crucial role in the broader Tokyo Electron group, contributing to advancements in semiconductor technology and supporting the global electronics industry.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 13 2026

29 Patents

#1 in Esashi

#2,359 in Japan

#22,552 in the World

Tokyo Electron Tohoku Limited

Forward Citations = 3,466

51 inventors:

Katsumi Ishii (3 out of 22 patents)

Tetsu Ohsawa (3 out of 8 patents)

Junichi Arami (2 out of 32 patents)

4. Kazuo Terada (2 out of 11 patents)

5. Toshiharu Nishimura (2 out of 14 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Tokyo Electron Tohoku Limited. Retrieved from https://idiyas.com/company/tokyo-electron-tohoku

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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