Location History:
- Sagamihara, JP (1993 - 2000)
- Shiroyama-Machi, JP (2004 - 2010)
- Tokyo, JP (2020)
Company Filing History:
Years Active: 1993-2020
Title: Kazunari Sakata: Innovator in Substrate Processing Technologies
Introduction
Kazunari Sakata is a prominent inventor based in Sagamihara, Japan. He has made significant contributions to the field of substrate processing, holding a total of 13 patents. His innovative work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses and heat treatment systems.
Latest Patents
One of Sakata's latest patents is a substrate processing apparatus designed to operate under a vacuum atmosphere. This apparatus includes a substrate processing part, a substrate transfer part, and a load lock part that facilitates the transition between air and vacuum atmospheres. The design allows for improved processing of substrates while maintaining optimal conditions.
Another notable patent is a vertical heat treatment system that simplifies the structure of mechanisms near an opening in a partition wall. This system is capable of saving space while effectively carrying out predetermined treatments on objects. The innovative design includes a standby box transfer means that holds the treating-object housing box in proximity to the opening, enhancing the overall efficiency of the heat treatment process.
Career Highlights
Kazunari Sakata has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Sagami Limited. His experience in these organizations has allowed him to develop and refine his innovative ideas in substrate processing technologies.
Collaborations
Throughout his career, Sakata has collaborated with esteemed colleagues such as Katsumi Ishii and Kenichi Yamaga. These partnerships have contributed to the advancement of his inventions and the overall progress in the field.
Conclusion
Kazunari Sakata's contributions to substrate processing and heat treatment technologies have established him as a key figure in the industry. His innovative patents reflect his commitment to improving processing efficiency and effectiveness. His work continues to influence advancements in semiconductor manufacturing.