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Kanagawa, Japan

Tokyo Electron Sagami Limited

USPTO Granted Patents = 51

Forward Citations = 2,495

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77 inventors (with patents filed for the assignee):

Katsumi Ishii (8 out of 22 patents)

Ken Nakao (6 out of 43 patents)

Takanobu Asano (6 out of 18 patents)

4. Hirofumi Kitayama (6 out of 14 patents)

5. Kenichi Yamaga (5 out of 38 patents)

6. Kazunari Sakata (4 out of 13 patents)

7. Susumu Tanaka (3 out of 17 patents)

8. Shingo Watanabe (3 out of 26 patents)

9. Keitaro Imai (3 out of 62 patents)

10. Shinji Miyazaki (3 out of 21 patents)

11. Hiroyuki Iwai (3 out of 11 patents)

12. Kikuo Yamabe (3 out of 19 patents)

13. Hirotsugu Shiraiwa (3 out of 9 patents)

14. Mitsuo Kato (3 out of 4 patents)

15. Masaharu Abe (3 out of 3 patents)

Core Competencies:

Substrate Transferring Apparatus

Heat Treatment Apparatus

Wafer Transfer Device

Oxidation Processing Apparatus

Vertical Heat Treatment Apparatus

Carrier Conveying Apparatus

Semiconductor Processing

Heating Element Control

Clean Air Apparatus

Heat Processing Apparatus

Wafer Alignment Device

Thermal Treating Apparatus

51 patents: Sort by Forward Citations

1. 5445486 - Substrate transferring apparatus (1995-08-29),

2. 5431561 - Method and apparatus for heat treating (1995-07-11),

3. 5423503 - Plate-like member conveying apparatus (1995-06-13),

4. 5409348 - Substrate transfer method (1995-04-25),

5. 5407350 - Heat-treatment apparatus (1995-04-18),

6. 5380137 - Wafer transfer device (1995-01-10),

7. 5330352 - Oxidation/diffusion processing apparatus (1994-07-19),

8. 5324920 - Heat treatment apparatus (1994-06-28),

9. 5318633 - Heat treating apparatus (1994-06-07),

10. 5316472 - Vertical boat used for heat treatment of semiconductor wafer and (1994-05-31),

11. 5297956 - Method and apparatus for heat treating (1994-03-29),

12. 5284412 - Stock unit for storing carriers (1994-02-08),

13. 5279670 - Vertical type diffusion apparatus (1994-01-18),

14. 5277579 - Wafers transferring method in vertical type heat treatment apparatus and (1994-01-11),

15. 5275521 - Wafer transfer device (1994-01-04),

Tokyo Electron Sagami Limited is a leading global semiconductor manufacturing equipment company. They provide innovative solutions and technologies for the semiconductor industry, offering a wide range of products including wafer processing equipment, inspection and metrology systems, and advanced packaging and assembly solutions. With a commitment to excellence, Tokyo Electron Sagami Limited strives to contribute to the advancement of semiconductor technology and enable its customers to thrive in a rapidly evolving industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

51 Patents

#54 in Kanagawa

#1,651 in Japan

#13,381 in the World

Kanagawa, Japan

Tokyo Electron Sagami Limited

Forward Citations = 2,495

77 inventors:

Katsumi Ishii (8 out of 22 patents)

Ken Nakao (6 out of 43 patents)

Takanobu Asano (6 out of 18 patents)

4. Hirofumi Kitayama (6 out of 14 patents)

5. Kenichi Yamaga (5 out of 38 patents)

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