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Kanagawa, Japan

Tokyo Electron Sagami Limited

USPTO Granted Patents = 51

Forward Citations = 2,539

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77 inventors (with patents filed for the assignee):

Katsumi Ishii (8 out of 22 patents)

Ken Nakao (6 out of 43 patents)

Takanobu Asano (6 out of 18 patents)

4. Hirofumi Kitayama (6 out of 14 patents)

5. Kenichi Yamaga (5 out of 38 patents)

6. Kazunari Sakata (4 out of 13 patents)

7. Susumu Tanaka (3 out of 17 patents)

8. Shingo Watanabe (3 out of 29 patents)

9. Keitaro Imai (3 out of 62 patents)

10. Shinji Miyazaki (3 out of 21 patents)

11. Hiroyuki Iwai (3 out of 11 patents)

12. Kikuo Yamabe (3 out of 19 patents)

13. Hirotsugu Shiraiwa (3 out of 9 patents)

14. Mitsuo Kato (3 out of 4 patents)

15. Masaharu Abe (3 out of 3 patents)

Core Competencies:

Substrate Transferring Apparatus

Heat Treatment Apparatus

Wafer Transfer Device

Vertical Heat Treatment Apparatus

Oxidation Processing Apparatus

Carrier Conveying Apparatus

Film Forming Device

Clean Air Apparatus

Heat Processing Apparatus

Vertical Type Diffusion Apparatus

Heating Element Control

Wafer Counter

51 patents: Sort by Forward Citations

1. 5445486 - Substrate transferring apparatus (1995-08-29),

2. 5431561 - Method and apparatus for heat treating (1995-07-11),

3. 5423503 - Plate-like member conveying apparatus (1995-06-13),

4. 5409348 - Substrate transfer method (1995-04-25),

5. 5407350 - Heat-treatment apparatus (1995-04-18),

6. 5380137 - Wafer transfer device (1995-01-10),

7. 5330352 - Oxidation/diffusion processing apparatus (1994-07-19),

8. 5324920 - Heat treatment apparatus (1994-06-28),

9. 5318633 - Heat treating apparatus (1994-06-07),

10. 5316472 - Vertical boat used for heat treatment of semiconductor wafer and (1994-05-31),

11. 5297956 - Method and apparatus for heat treating (1994-03-29),

12. 5284412 - Stock unit for storing carriers (1994-02-08),

13. 5279670 - Vertical type diffusion apparatus (1994-01-18),

14. 5277579 - Wafers transferring method in vertical type heat treatment apparatus and (1994-01-11),

15. 5275521 - Wafer transfer device (1994-01-04),

Tokyo Electron Sagami Limited, based in Kanagawa, Japan, specializes in the development and manufacturing of advanced semiconductor processing equipment. The company focuses on critical technologies such as substrate transferring apparatus, heat treatment apparatus, and wafer transfer devices, which are essential for the fabrication of semiconductor devices. With a commitment to innovation, Tokyo Electron Sagami plays a pivotal role in enhancing the efficiency and effectiveness of semiconductor production processes, contributing to the broader electronics industry.

Profile summary based on public USPTO records.

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USPTO Data Jan 1 1976 - Oct 6 2026

Tokyo Electron Sagami Limited

51 Patents

#62 in Kanagawa

#1,684 in Japan

#13,766 in the World

Kanagawa, Japan

Tokyo Electron Sagami Limited

Forward Citations = 2,539

77 inventors:

Katsumi Ishii (8 out of 22 patents)

Ken Nakao (6 out of 43 patents)

Takanobu Asano (6 out of 18 patents)

4. Hirofumi Kitayama (6 out of 14 patents)

5. Kenichi Yamaga (5 out of 38 patents)

Please report any incorrect information to [email protected]

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