The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 1995
Filed:
May. 05, 1993
Applicant:
Inventors:
Susumu Tanaka, Tokyo, JP;
Takanobu Asano, Tokyo, JP;
Hisashi Kikuchi, Tokyo, JP;
Noboru Sato, Tokyo, JP;
Assignee:
Tokyo Electron Sagami Limited, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
248176 ; 2482951 ; 211-157 ;
Abstract
A plate-like member conveying apparatus includes five holding arms arranged parallel to each other in one direction and capable of supporting wafers, a link mechanism for connecting said holding arms to each other and for, when at least one holding arm is moved in the one direction, moving the remaining holding arms such that the pitch thereamong is equal, and a nut-screw driving mechanism for moving the at least one holding arm in the one direction.