The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1994
Filed:
Mar. 06, 1992
Akihito Yamamoto, Tokyo, JP;
Naohiko Yasuhisa, Tokyo, JP;
Noriyoshi Mashimo, Tokyo, JP;
Masaharu Abe, Fuchu Tokyo, JP;
Shingo Watanabe, Fuchu Tokyo, JP;
Tokyo Electron Sagami Limited, Kanagawa, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A heat treating apparatus comprises a reaction tube for receiving a plurality of articles to be treated and a heating unit surrounding at least part of the reaction tube. The reaction tube comprises a first structural section, at least part of which is surrounded by the heating unit and a second structural section, at least part of which extends from the heating unit. The first structural section is made of material having thermal resistivity and thermal conductivity higher than the second structural section.