The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
Aug. 23, 2001
Kazunari Sakata, Shiroyama-machi, JP;
Koyu Hasegawa, Shiroyama-machi, JP;
Keiichi Katabuchi, Shiroyama-machi, JP;
Shingo Watanabe, Shiroyama-machi, JP;
Shinya Mochizuki, Shiroyama-machi, JP;
Motoki Akimoto, Shiroyama-machi, JP;
Hiroshi Motono, Shiroyama-machi, JP;
Kazunari Sakata, Shiroyama-machi, JP;
Koyu Hasegawa, Shiroyama-machi, JP;
Keiichi Katabuchi, Shiroyama-machi, JP;
Shingo Watanabe, Shiroyama-machi, JP;
Shinya Mochizuki, Shiroyama-machi, JP;
Motoki Akimoto, Shiroyama-machi, JP;
Hiroshi Motono, Shiroyama-machi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A heat treatment system and method for cooling a loading chamber that includes a heat treatment furnace for heat-treating an object to be treated. The heat treatment furnace includes a throat for carrying the object in and out, and a cooling mechanism for cooling the vicinity of the throat. The cooling mechanism has a ventilating unit with a ventilating port for sending a cooling fluid toward the vicinity of the throat and a heat exchanger arranged so as to face the ventilating port in the vicinity of the throat. The cooling mechanism also has an intake fan for sucking the cooling fluid in the vicinity of the throat over the heat exchanger. When the object to be treated is carried in, the structure of various mechanisms in the vicinity of the throat is simplified, and space is saved.