The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 1993
Filed:
Jul. 10, 1992
Applicant:
Inventors:
Kenichi Yamaga, Sagamihara, JP;
Kazunari Sakata, Sagamihara, JP;
Katsumi Ishii, Fujino, JP;
Takashi Tanahashi, Machida, JP;
Syuji Moriya, Yamanashi, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Sagami Limited, Kanagawa, JP;
Primary Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
55213 ; 553851 ; 55481 ; 414416 ; 454187 ;
Abstract
A clean air apparatus comprises a body in which clean air is supplied, an I/O port having an opening for carrying a carrier housing objects to be treated in/out of the body, a door which opens/closes the opening, and dust preventing device for preventing dusts from entering the body from the outside through the opening, when the door is opened.