The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 1997
Filed:
Jul. 10, 1996
Applicant:
Inventors:
Katsumi Ishii, Kanagawa-ken, JP;
Hisashi Kikuchi, Esashi, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Tokyo Electron Tohoku Limited, Esashi, JP;
Primary Examiner:
Int. Cl.
CPC ...
B65H / ;
U.S. Cl.
CPC ...
414416 ; 414749 ; 414941 ; 414937 ; 901 47 ;
Abstract
A plate-like object carrier device comprising plural arms arranged at a same pitch interval to horizontally support a wafer on each of the arms, a first motor for driving a single arm forward and backward and independently of a group of arms, a second motor for driving the group of arms forward and backward at the same time except the single arm, a power supply for supplying power to the first and second motors, and a controller for selecting whether to supply power only to the first motor or both of the first and second motors.