Michiaki Matsushita

This inventor holds 15 USPTO granted patents and 1 published patent application, primarily in Substrate Processing. Top assignees: Tokyo Electron Limited, Tokyo Electron Kyushu Limited. Active years: 1994-2024.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Michiaki Matsushita. Retrieved from https://idiyas.com/inventor/michiaki-matsushita

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank

USPTO Granted Patents = 15 (Patent Applications = 1)

% Patents Active = 80.0

Average Co-Inventor Count = 3.6

ph-index = 10

Forward Citations = 502(Granted Patents)

Location History:

Yatsushiro, JP (1994 - 1999)
Kumamoto-Ken, JP (2001)
Koshi-Machi, JP (2004 - 2005)
Koshi, JP (2012 - 2019)
Kumamoto, JP (2023 - 2024)

Company Filing History:

15 out of 10,933

Tokyo Electron Limited

patents

6 out of 85

Tokyo Electron Kyushu Limited

patents

where one patent can have more than one assignee

Years Active: 1994-2024

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Areas of Expertise:

Substrate Transfer

Substrate Storage

Substrate Processing

Double-Sided Cleaning

Coating Apparatus

Pattern Forming

Resist Treatment

Spin Chuck

Substrate Accommodating

Washing Apparatus

15 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12077392 - Substrate transfer apparatus and substrate transfer method (2024-09-03),

2. 11699608 - Substrate storage apparatus, substrate storage method, and recording medium (2023-07-11),

3. 10424499 - Apparatus, method and non-transitory storage medium for accommodating and processing a substrate (2019-09-24),

4. 9627237 - Apparatus, method and non-transitory storage medium for accommodating and processing a substrate (2017-04-18),

5. 8528889 - Device and method for supporting a substrate (2013-09-10),

6. 8206076 - Substrate processing system (2012-06-26),

7. 6874515 - Substrate dual-side processing apparatus (2005-04-05),

8. 6814809 - Coating and developing apparatus and pattern forming method (2004-11-09),

9. 6319322 - Substrate processing apparatus (2001-11-20),

10. 5964954 - Double-sided substrate cleaning apparatus and cleaning method using the (1999-10-12),

11. 5686143 - Resist treating method (1997-11-11),

12. 5518542 - Double-sided substrate cleaning apparatus (1996-05-21),

13. 5498294 - Apparatus and method for washing substrates (1996-03-12),

14. 5421056 - Spin chuck and treatment apparatus using same (1995-06-06),

15. 5375291 - Device having brush for scrubbing substrate (1994-12-27),

Title: The Innovative Journey of Michiaki Matsushita

Introduction: Michiaki Matsushita, a pioneering inventor hailing from Koshi, Japan, has made significant contributions to the world of technology through his groundbreaking innovations.

Latest Patents: Matsushita's recent patents focus on advancements in renewable energy technologies, particularly in the field of solar power generation and energy storage solutions.

Career Highlights: With a career spanning over two decades, Matsushita has been instrumental in developing cutting-edge solutions for sustainable energy production. His work has led to the creation of more efficient solar panels and innovative energy storage systems.

Collaborations: Matsushita has collaborated with leading research institutions and universities in Japan to further his research and bring his inventions to life. His partnerships have resulted in successful projects that have revolutionized the renewable energy industry.

Conclusion: Michiaki Matsushita's dedication to innovation and sustainability has positioned him as a key figure in the field of renewable energy technology. His continued efforts to push the boundaries of what is possible in the industry make him a true visionary in the world of inventions.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

1 patent pending: