The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Jun. 11, 2008
Issei Ueda, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Akira Miyata, Koshi, JP;
Kensei Yamamoto, Koshi, JP;
Yuichi Yamamoto, Minato-ku, JP;
Michiaki Matsushita, Koshi, JP;
Issei Ueda, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Akira Miyata, Koshi, JP;
Kensei Yamamoto, Koshi, JP;
Yuichi Yamamoto, Minato-ku, JP;
Michiaki Matsushita, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette waiting unit, a cassette delivery unit, and a substrate processing unit are provided. In the cassette waiting block, a cassette transfer unit for transferring the cassette between the cassette transfer in/out unit, the cassette waiting unit, and the cassette deliver unit, and a transfer unit for transferring the substrate between the cassette in the cassette waiting unit and the substrate processing unit are provided. Each cassette waiting unit has an opening mechanism for opening a port of the cassette.