The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Mar. 29, 2010
Seiji Nakano, Koshi, JP;
Michiaki Matsushita, Koshi, JP;
Naruaki Iida, Koshi, JP;
Suguru Enokida, Koshi, JP;
Katsuhiro Morikawa, Koshi, JP;
Seiji Nakano, Koshi, JP;
Michiaki Matsushita, Koshi, JP;
Naruaki Iida, Koshi, JP;
Suguru Enokida, Koshi, JP;
Katsuhiro Morikawa, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A substrate support device including a support member having a lower-surface support section to support a lower surface of a substrate; and a position restriction section provided on the lower-surface support section, the position restriction section being formed to surround a periphery of the substrate supported on the lower-surface support section and restrict a position of the substrate. At least one of the lower-surface support section and the position restriction section includes a base material and a protective film formed to cover the base material and prevent at least one of wear and chemical erosion to which the base material will be subject. The substrate support device further includes, for example, a base that supports the support member, and a driving structure that moves the support member in a relative fashion with respect to the base, and is constructed as a substrate transport device.