Location History:
- Kumamoto, JP (2021 - 2022)
- Koshi, JP (2009 - 2023)
Company Filing History:
Years Active: 2009-2025
Title: Innovations and Contributions of Katsuhiro Morikawa
Introduction
Katsuhiro Morikawa is an esteemed inventor based in Koshi, Japan, with a remarkable portfolio of 23 patents. His work primarily focuses on advancements in processing technologies, contributing significantly to the semiconductor manufacturing industry through innovative solutions.
Latest Patents
One of his latest patents is a **Processing Liquid Nozzle and Cleaning Apparatus**. This invention integrates an ultrasonic wave generator, which comprises an oscillator and an oscillating body, enhancing the efficiency of liquid processing. It features a first supply flow path that ensures effective contact with the oscillating body, and an ejection flow path that directs the liquid modified by ultrasonic waves to an ejection port. It also incorporates a second supply flow path for an additional liquid, allowing for superior processing capabilities.
Another prominent patent by Morikawa is the **Substrate Processing Apparatus with Moving Device for Connecting and Disconnecting Heater Electrodes and Substrate Processing Method Thereof**. This invention includes a rotation driving device designed to rotate a rotary table, which holds the substrate. It employs an electric heater to heat the substrate, with a unique electrode moving device that enables connectivity between power feeding and receiving electrodes. This innovation significantly enhances substrate processing efficiency by integrating multiple functionalities within a single apparatus.
Career Highlights
Katsuhiro Morikawa currently contributes his expertise at Tokyo Electron Limited, a leading company in the semiconductor and flat panel display manufacturing equipment industry. His extensive portfolio and innovative spirit have not only earned him numerous patents but also positioned him as a pivotal figure in advancing processing technologies.
Collaborations
Throughout his career, Morikawa has collaborated with notable coworkers such as Kouichi Mizunaga and Masami Akimoto. These partnerships have fostered an environment of creativity and innovation, allowing for the successful development of groundbreaking technologies in the field.
Conclusion
Katsuhiro Morikawa exemplifies the spirit of innovation, with his contributions continuously shaping the landscape of substrate processing technology. His latest patents demonstrate his commitment to enhancing industry standards and addressing various challenges within the semiconductor manufacturing arena. As he continues to push technological boundaries, Morikawa remains a key figure in the evolution of processing liquid technologies.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.