The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Sep. 14, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 17/06 (2006.01); B08B 3/02 (2006.01); B08B 3/08 (2006.01); B08B 3/12 (2006.01); B08B 5/02 (2006.01); B08B 5/04 (2006.01); B08B 13/00 (2006.01);
U.S. Cl.
CPC ...
B05B 17/0676 (2013.01); B08B 3/022 (2013.01); B08B 3/08 (2013.01); B08B 3/123 (2013.01); B08B 5/02 (2013.01); B08B 5/04 (2013.01); B08B 13/00 (2013.01); B08B 2203/0217 (2013.01); B08B 2203/0288 (2013.01);
Abstract
A processing liquid nozzle includes: an ultrasonic wave generator including a oscillator that generates ultrasonic waves and a oscillating body that is joined to the oscillator; a first supply flow path configured to supply a first liquid to a position in contact with the oscillating body of the ultrasonic wave generator; an ejection flow path configured to supply the first liquid to which the ultrasonic waves are applied by the ultrasonic wave generator to an ejection port; and a second supply flow path connected to the ejection flow path on a downstream side from the ultrasonic wave generator and configured to supply a second liquid to the ejection flow path.