This inventor holds 2 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2024.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2024
Title: Takahiro Koga: Innovator in Substrate Processing Technology
Introduction
Takahiro Koga is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 2 patents to his name, Koga's work focuses on enhancing the efficiency and effectiveness of processing liquid nozzles and cleaning apparatuses.
Latest Patents
Koga's latest patents include a "Processing Liquid Nozzle" and a "Substrate Processing Apparatus." The processing liquid nozzle features an ultrasonic wave generator that includes an oscillator generating ultrasonic waves and an oscillating body joined to the oscillator. It also has a first supply flow path for delivering a first liquid to the oscillating body, an ejection flow path for supplying the treated liquid to an ejection port, and a second supply flow path for providing a second liquid downstream of the ultrasonic wave generator. The substrate processing apparatus consists of a fluid supply unit that delivers a pressurized vapor or mist of purified water, a processing liquid supply unit for sulfuric acid, and a nozzle with multiple discharge ports for mixing the fluids effectively.
Career Highlights
Takahiro Koga is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative designs and patents have contributed to advancements in substrate processing technologies, making significant impacts in the field.
Collaborations
Koga has collaborated with notable coworkers such as Daisuke Goto and Nobuhiro Ogata. Their teamwork has fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies in their field.
Conclusion
Takahiro Koga's contributions to substrate processing technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in processing techniques, showcasing the importance of innovation in technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile