The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Feb. 18, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Naruaki Iida, Koshi, JP;
Katsuhiro Morikawa, Koshi, JP;
Assignee:
Tokyo Electron Limited, Minato-Ku, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); G05B 19/418 (2006.01); H01L 21/687 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4189 (2013.01); H01L 21/67766 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); G05B 2219/45031 (2013.01); Y02P 90/28 (2015.11);
Abstract
A substrate processing apparatus includes: first and second places in which a substrate can be placed; a substrate transfer device having a substrate holder that holds the substrate to transfer the substrate between the first and second places; and a substrate position measuring unit that detects a position of the substrate held by the substrate holder. The substrate position measuring unit, disposed independently of the substrate transfer device, is arranged at a position where the substrate held by the substrate holder of the substrate transfer device can be placed.