This inventor holds 22 USPTO granted patents and 1 published patent application and 6 EPO patents, primarily in Plasma Processing. Top assignees: Tokyo Electron Limited, Fujikura Limited, Tokyo Electron Limi Ted. Active years: 1987-2023.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Tokyo, JP (1987 - 1994)
- Miyagi, JP (2017)
- Nirasaki, JP (2008 - 2020)
- Yamanashi, JP (2019 - 2020)
- Hillsboro, OR (US) (2023)
Company Filing History:
14 out of 10,918 
6 out of 1,874 
2 out of 103 Years Active: 1987-2023
Areas of Expertise:
Title: The Innovative Contributions of Masaru Sugimoto
Introduction
Masaru Sugimoto is a prominent inventor based in Nirasaki, Japan, known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of 22 patents, Sugimoto has made strides in the development of advanced manufacturing processes for semiconductor devices.
Latest Patents
One of his latest patents is titled "Fabrication process flow of dielectric layer for isolation of nano-sheet devices on bulk silicon substrate." This invention outlines a method for manufacturing a semiconductor device that involves forming a support on a side surface of a stack extending from a substrate. The stack comprises a second sacrificial film, multiple first sacrificial films, and several silicon-containing films. The method includes removing the second sacrificial film to create a space filled with a dielectric film. Another notable patent is the "Plasma etching apparatus and method," which describes a plasma etching apparatus featuring a second electrode for supporting a target substrate. This apparatus includes a control system that allows for the modulation of RF power supply, enhancing the efficiency of plasma ignition and etching processes.
Career Highlights
Throughout his career, Masaru Sugimoto has worked with leading companies in the semiconductor industry, including Tokyo Electron Limited and Fujikura Limited. His experience in these organizations has contributed to his expertise in semiconductor manufacturing and innovation.
Collaborations
Sugimoto has collaborated with notable professionals in the field, including Akira Koshiishi and Noriyuki Kobayashi. These collaborations have further enriched his work and expanded the impact of his inventions.
Conclusion
Masaru Sugimoto's innovative contributions to semiconductor technology and his extensive patent portfolio highlight his role as a key figure in the industry. His work continues to influence advancements in manufacturing processes and equipment design.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile