Location History:
- Tokyo, JP (1987 - 1994)
- Miyagi, JP (2017)
- Nirasaki, JP (2008 - 2020)
- Yamanashi, JP (2019 - 2020)
- Hillsboro, OR (US) (2023)
Company Filing History:
14 out of 10,295 
6 out of 1,801 
2 out of 101 Years Active: 1987-2023
Title: The Innovative Contributions of Masaru Sugimoto
Introduction
Masaru Sugimoto is a prominent inventor based in Nirasaki, Japan, known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of 22 patents, Sugimoto has made strides in the development of advanced manufacturing processes for semiconductor devices.
Latest Patents
One of his latest patents is titled "Fabrication process flow of dielectric layer for isolation of nano-sheet devices on bulk silicon substrate." This invention outlines a method for manufacturing a semiconductor device that involves forming a support on a side surface of a stack extending from a substrate. The stack comprises a second sacrificial film, multiple first sacrificial films, and several silicon-containing films. The method includes removing the second sacrificial film to create a space filled with a dielectric film. Another notable patent is the "Plasma etching apparatus and method," which describes a plasma etching apparatus featuring a second electrode for supporting a target substrate. This apparatus includes a control system that allows for the modulation of RF power supply, enhancing the efficiency of plasma ignition and etching processes.
Career Highlights
Throughout his career, Masaru Sugimoto has worked with leading companies in the semiconductor industry, including Tokyo Electron Limited and Fujikura Limited. His experience in these organizations has contributed to his expertise in semiconductor manufacturing and innovation.
Collaborations
Sugimoto has collaborated with notable professionals in the field, including Akira Koshiishi and Noriyuki Kobayashi. These collaborations have further enriched his work and expanded the impact of his inventions.
Conclusion
Masaru Sugimoto's innovative contributions to semiconductor technology and his extensive patent portfolio highlight his role as a key figure in the industry. His work continues to influence advancements in manufacturing processes and equipment design.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.