Location History:
- Yamaguchi, JP (2004)
- Kudamatsu, JP (2003 - 2013)
Company Filing History:
Years Active: 2003-2013
Title: Masamichi Sakaguchi: Innovator in Plasma Processing Technology
Introduction
Masamichi Sakaguchi is a prominent inventor based in Kudamatsu, Japan. He has made significant contributions to the field of plasma processing, holding a total of 12 patents. His innovative approaches have advanced the technology used in various industrial applications.
Latest Patents
Sakaguchi's latest patents focus on plasma processing methods that aim to enhance efficiency and reduce contamination. One notable invention is a plasma processing method that minimizes the emission of contaminating matters caused by a quality-altered layer on the surface of yttria within a processing chamber. This method includes an etching step where a sample is placed inside the chamber, followed by a deposition-product removing step that utilizes plasma generated from gases containing fluorine or chlorine. Another patent outlines a method that involves feeding a transferring gas to decrease pressure differences between processing and transfer chambers, preventing particles from adhering to the processing sample.
Career Highlights
Throughout his career, Masamichi Sakaguchi has worked with leading companies in the technology sector, including Hitachi High-Technologies Corporation and Hitachi, Ltd. His work has been instrumental in developing advanced plasma processing techniques that are widely used in the industry.
Collaborations
Sakaguchi has collaborated with notable professionals in his field, including Go Saito and Hiroaki Ishimura. These collaborations have further enriched his research and development efforts, leading to innovative solutions in plasma technology.
Conclusion
Masamichi Sakaguchi's contributions to plasma processing technology have established him as a key figure in the field. His patents reflect a commitment to innovation and excellence, making a lasting impact on the industry.