Masahiro Kato

Title: Masahiro Kato: Innovator in Semiconductor Technology

Introduction

Masahiro Kato is a prominent inventor based in Takasaki, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 11 patents. His work focuses on improving the efficiency and effectiveness of semiconductor wafers, which are crucial components in modern electronics.

Latest Patents

Kato's latest patents include a bonded semiconductor wafer and a method for manufacturing bonded semiconductor wafers. The bonded semiconductor wafer features a single crystal silicon layer on its main surface. This wafer is designed with a base wafer composed of a silicon single crystal, along with a first dielectric layer, a polycrystalline silicon layer, a second dielectric layer, and the single crystal silicon layer arranged in a specific order. A bonding plane lies between the polycrystalline silicon layer and the second dielectric layer. This innovative design helps prevent the base wafer from lowering its specific resistance due to impurities and electric charge influences in the BOX oxide film. Additionally, it reduces distortion of radio-frequency fundamental signals and crosstalk signals between circuits, while also enhancing mass productivity.

Another significant patent is a method for evaluating semiconductor wafers. This method involves detecting semiconductor wafer LPDs (large particle defects) in two measurement modes. It includes size classification of the LPDs, calculating distances between detection coordinates, and determining relative angles. By presetting determination criteria, Kato's method classifies each LPD as either foreign matter or a killer defect based on size classification. This approach allows for the classification of all LPDs, even those from which quantitative size information cannot be provided.

Career Highlights

Throughout his career, Masahiro Kato has worked with notable companies such as Shin-Etsu Handotai Co., Ltd. and Shin-Etsu Chemical Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.

Collaborations

Kato has collaborated with esteemed colleagues, including Isao Yokokawa and Norihiro Kobayashi. These partnerships have furthered his research and development efforts in the semiconductor field.

Conclusion

Masahiro Kato's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the industry. His work continues to influence advancements in electronics and semiconductor manufacturing.