Location History:
- Kokubunji, JP (2008)
- Tokyo, JP (2016 - 2024)
Company Filing History:
15 out of 1,146 
7 out of 2,874 
6 out of 42,517 
Years Active: 2008-2025
Title: **Makoto Sakakibara: Innovator in Charged Particle Beam Technology**
Introduction
Makoto Sakakibara, located in Tokyo, Japan, is a prominent inventor known for his contributions to the field of charged particle beam technology. With a remarkable portfolio of 27 patents, he continues to push the boundaries of innovation in semiconductor inspection and charged particle applications.
Latest Patents
Sakakibara's latest patents showcase his expertise in advanced technology. One of his key inventions is the **Charged Particle Beam Device**, designed to minimize positional shifts between secondary beams generated in a beam separator. The device features a charged particle beam source that irradiates a sample with multiple primary beams, alongside a beam separator that deflects secondary beams in distinct directions. Notably, a deflector is incorporated to correct any positional shifts arising from the beam separator.
Another significant invention is the **Semiconductor Inspection Device and Method for Inspecting Semiconductor Samples**. This device operates in two measurement modes and includes an electron optical system and an optical system to irradiate the sample with both electron beams and light. This sophisticated setup consists of detectors to capture signals from both the electrons and light, providing an innovative approach to semiconductor inspection.
Career Highlights
Throughout his career, Makoto Sakakibara has held positions in esteemed organizations, specifically at Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation. His work in these companies has significantly contributed to the development of sophisticated technologies in the field.
Collaborations
Sakakibara has collaborated with notable coworkers, including Momoyo Enyama and Hajime Kawano. Their combined efforts in research and development have further advanced the capabilities and applications of charged particle beam technology.
Conclusion
Makoto Sakakibara stands out as a key inventor whose innovative approach to charged particle beam devices and semiconductor inspection methods plays a pivotal role in advancing technological solutions. His extensive patent portfolio reflects a commitment to pushing the boundaries of scientific and engineering applications, marking him as a vital figure in his field.