The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 05, 2022

Filed:

Aug. 09, 2019
Applicant:

Hitachi, Ltd., Tokyo, JP;

Inventors:

Takafumi Miwa, Tokyo, JP;

Hirokazu Tamaki, Tokyo, JP;

Momoyo Enyama, Tokyo, JP;

Makoto Sakakibara, Tokyo, JP;

Sayaka Kurata, Tokyo, JP;

Atsuko Shintani, Tokyo, JP;

Takashi Dobashi, Tokyo, JP;

Kotoko Urano, Tokyo, JP;

Akiko Kagatsume, Tokyo, JP;

Minseok Park, Tokyo, JP;

Yasuhiro Shirasaki, Tokyo, JP;

Thantip Krasienapibal, Tokyo, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/265 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01);
Abstract

A measurement system comprising: a measurement apparatus observing a sample based on an observation condition including parameters; and an observation condition database storing data in which a search key related to the sample and the observation condition, a control unit calculating information on an observation condition of a sample is configured to: receive an observation condition search request including a search key related to a target sample; refer the observation condition database to search for the first data matching or similar to the search key related to the target sample included in the observation condition search request, calculate, based on the searched first data, a candidate observation condition of the measurement apparatus for observing the target sample, and output display data for presenting the candidate observation condition.


Find Patent Forward Citations

Loading…