Atsuko Shintani

Title: Atsuko Shintani: Innovator in Charged Particle Beam Technology

Introduction

Atsuko Shintani is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of charged particle beam technology, holding a total of 5 patents. Her work focuses on enhancing imaging techniques and evaluation methods in various applications.

Latest Patents

Atsuko Shintani's latest patents include a charged particle beam device and an inspection device. The charged particle beam device is designed to calibrate first image data generated from a detector's output when a sample is scanned two-dimensionally. This device generates second image data by utilizing multiple first signal profiles that correspond to signal strength distributions. Additionally, it incorporates a power spectral density function to address signal processing delays. Another notable patent is a pattern shape evaluation device, which evaluates line-edge roughness and line width roughness while minimizing noise interference. This device extracts edge positions based on averaged signal profiles and calculates noise floor heights using power spectral density data.

Career Highlights

Throughout her career, Atsuko Shintani has worked with esteemed companies such as Hitachi High-Tech Corporation and Hitachi, Ltd. Her experience in these organizations has allowed her to develop innovative solutions in her field.

Collaborations

Atsuko has collaborated with notable colleagues, including Hiroki Kawada and Kazuhisa Hasumi. These partnerships have contributed to her success and the advancement of technology in charged particle beam applications.

Conclusion

Atsuko Shintani's contributions to charged particle beam technology and her innovative patents highlight her role as a leading inventor in her field. Her work continues to influence advancements in imaging and evaluation methods.