The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
May. 29, 2019
Hitachi High-tech Corporation, Tokyo, JP;
Atsuko Shintani, Tokyo, JP;
Takahiro Kawasaki, Tokyo, JP;
Kazuhisa Hasumi, Tokyo, JP;
Masami Ikota, Tokyo, JP;
Hiroki Kawada, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
Line-edge roughness or line width roughness is evaluated while preventing influence of noise caused by a device or an environment. Therefore, an averaged signal profilein which a moving average of S pixels (S is an integer greater than 1) is taken in a Y direction is obtained from a signal profile showing a secondary electron signal amount distribution in an X direction with respect to a predetermined Y coordinate obtained from a top-down image, an edge positionof a line pattern is extracted based on the averaged signal profile, and a noise floor height is calculated based on a first power spectral densityof LER data or LWR data based on the extracted edge position and a second power spectral densityof a rectangular window function corresponding to the moving average of the S pixels.