Masami Ikota

Title: **Masami Ikota: A Pioneer in Ion Beam Technology**

Introduction

Masami Ikota, an accomplished inventor based in Tokyo, Japan, has made significant contributions to the field of ion beam technology. With a total of nine patents to his name, Ikota’s innovative work has revolutionized the way we evaluate material structures, especially in the realms of semiconductor and material sciences.

Latest Patents

Among his latest inventions is an advanced ion beam device designed to measure structures located at various positions within a sample's thickness. This device utilizes an ion beam produced by ionizing gas elements and is capable of capturing both a first observation image of a specific region and a second observation image after processing a hole in a different area. By analyzing these images, the device provides valuable insights into the spatial relationships of the sample structures.

Additionally, Ikota has developed a pattern shape evaluation device, system, and method aimed at assessing line-edge and line width roughness while minimizing noise interference. This method employs an averaged signal profile to extract edge positions from secondary electron signals, thereby calculating a noise floor height that enhances the accuracy of the evaluation process.

Career Highlights

Masami Ikota has held key positions in renowned companies such as Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation, where he has been instrumental in pushing the boundaries of ion beam applications. His expertise and innovative approach have led to breakthroughs that are widely recognized in industry circles.

Collaborations

Throughout his career, Ikota has collaborated with several esteemed professionals, including Kazuhisa Hasumi and Takeyoshi Ohashi. These collaborations have further enriched the innovation landscape, spearheading projects aimed at advancing technology and enhancing product capabilities.

Conclusion

Masami Ikota’s dedication to research and innovation has made him a leading figure in the field of ion beam technology. His patents not only reflect his creativity and ingenuity but also contribute to the broader understanding of material structures, paving the way for advancements in various scientific and technological applications. As industries continue to evolve, the impact of Ikota's work will likely resonate for years to come.