Location History:
- Hitachinaka, JP (2013 - 2014)
- Tokyo, JP (2017 - 2023)
Company Filing History:
5 out of 1,116 
4 out of 2,874 
Years Active: 2013-2023
Title: Kazuhisa Hasumi: Innovator in Pattern Shape Evaluation Technology
Introduction
Kazuhisa Hasumi is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of pattern shape evaluation technology. With a total of 9 patents to his name, Hasumi's work focuses on enhancing the accuracy and efficiency of evaluating line-edge roughness and line width roughness.
Latest Patents
Hasumi's latest patents include a pattern shape evaluation device, a pattern shape evaluation system, and a pattern shape evaluation method. These inventions aim to evaluate line-edge roughness or line width roughness while minimizing the influence of noise caused by devices or environmental factors. The method involves obtaining an averaged signal profile by taking a moving average of S pixels in the Y direction from a secondary electron signal amount distribution in the X direction. This allows for the extraction of the edge position of a line pattern and the calculation of a noise floor height based on power spectral density data.
Another notable invention is an image processing device and method, along with a charged particle microscope. This invention quantitatively evaluates crystal growth amounts in a non-destructive manner, utilizing various image feature values extracted from scanning electron microscope (SEM) images. The technology determines undergrowth and overgrowth states based on brightness differences and pattern areas, providing valuable insights into crystal growth.
Career Highlights
Kazuhisa Hasumi has worked with notable companies such as Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation. His experience in these organizations has contributed to his expertise in the field of pattern shape evaluation and image processing technologies.
Collaborations
Hasumi has collaborated with esteemed colleagues, including Masami Ikota and Atsuko Yamaguchi. Their joint efforts have further advanced the innovations in the field of pattern evaluation and image processing.
Conclusion
Kazuhisa Hasumi's contributions to pattern shape evaluation technology and image processing have established him as a key figure in his field. His innovative patents reflect a commitment to improving measurement accuracy and efficiency in various applications.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.