Company Filing History:
Years Active: 2018-2025
Title: Yasuhiro Shirasaki: Innovator in Charged Particle Beam Technology
Introduction
Yasuhiro Shirasaki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 16 patents. His innovative work has advanced the capabilities of semiconductor inspection and sample observation methods.
Latest Patents
Among his latest patents is a charged particle beam device and sample observation method. This invention involves a charged particle optical system that scans a sample with a pulsed charged particle beam, detecting secondary charged particles to form a scan image. The control mechanism ensures synchronization of various timings for pulsed irradiation and detection, allowing for precise scanning and restoration of pixel values where signals may be defective. Another notable patent is a semiconductor inspection device and method for inspecting semiconductor samples. This device features both an electron optical system and an optical system, enabling it to irradiate samples with both electron beams and light under different measurement conditions. The integration of these systems allows for enhanced detection and analysis of semiconductor materials.
Career Highlights
Yasuhiro Shirasaki has worked with notable companies such as Hitachi High-Tech Corporation and Hitachi, Ltd. His experience in these organizations has contributed to his expertise in developing advanced technologies in the field of charged particle optics.
Collaborations
Throughout his career, Shirasaki has collaborated with talented individuals, including Momoyo Enyama and Natsuki Tsuno. These partnerships have fostered innovation and the exchange of ideas, further enhancing his contributions to the field.
Conclusion
Yasuhiro Shirasaki's work in charged particle beam technology exemplifies the impact of innovation in modern science. His patents and collaborations continue to influence advancements in semiconductor inspection and sample observation methods.
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