The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2022
Filed:
Aug. 06, 2020
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Minami Shouji, Tokyo, JP;
Natsuki Tsuno, Tokyo, JP;
Yasuhiro Shirasaki, Tokyo, JP;
Muneyuki Fukuda, Tokyo, JP;
Satoshi Takada, Tokyo, JP;
Assignee:
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/26 (2006.01); G01N 23/2251 (2018.01); G01N 27/04 (2006.01); G01N 27/22 (2006.01); G01B 15/02 (2006.01); G01N 23/2206 (2018.01);
U.S. Cl.
CPC ...
H01J 37/226 (2013.01); G01B 15/02 (2013.01); G01N 23/2206 (2013.01); G01N 23/2251 (2013.01); G01N 27/04 (2013.01); G01N 27/22 (2013.01); H01J 37/222 (2013.01); H01J 37/26 (2013.01); G01N 2223/07 (2013.01); G01N 2223/20 (2013.01); G01N 2223/40 (2013.01); G01N 2223/507 (2013.01); G01N 2223/633 (2013.01); G01N 2223/646 (2013.01);
Abstract
A charged particle beam device according to the present invention changes a signal amount of emitted charged particles by irradiating the sample with light due to irradiation under a plurality of light irradiation conditions, and determines at least any one of a material of the sample or a shape of the sample according to the changed signal amount.