The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 23, 2019

Filed:

Mar. 12, 2018
Applicant:

Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;

Inventors:

Yasuhiro Shirasaki, Tokyo, JP;

Momoyo Enyama, Tokyo, JP;

Kaori Shirahata, Tokyo, JP;

Makoto Sakakibara, Tokyo, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/244 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01); H01J 37/10 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/10 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/2448 (2013.01);
Abstract

A charged particle detector including a scintillator that is irradiated with charged particles, a fluorescent film being in contact with a first surface facing a second surface of the scintillator, the second surface being irradiated with the charged particles, and a photodetector that detects luminescence of the fluorescent film, wherein the fluorescent film has a plurality of regions, the plurality of regions respectively have phosphors that absorb luminescence of the scintillator and emit light with different wavelengths from one another, and a charged particle beam device using the charged particle detector.


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