The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Jun. 18, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Kazuo Ootsuga, Tokyo, JP;
Kazufumi Yachi, Tokyo, JP;
Makoto Sakakibara, Tokyo, JP;
Heita Kimizuka, Tokyo, JP;
Yusuke Abe, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
A charged particle beam device includes: a stageon which a sampleis to be placed; a charged particle optical system including a charged particle sourceand an objective lensthat focuses a charged particle beam from the charged particle source onto the sample; and a detectordisposed between the objective lens and the stage and configured to detect electronsemitted by an interaction between the charged particle beam and the sample. The stage, the charged particle optical system, and the detector are housed in a vacuum housing, and the detector includes a scintillator, a solid-state photomultiplier tube, and a light guideprovided between the scintillator and the solid-state photomultiplier tube, and an area of a light receiving surface of the scintillator is larger than an area of a light receiving surface of the solid-state photomultiplier tube.