Makoto Kawai

Title: **Innovative Contributions of Makoto Kawai in the Field of Composite Wafer Technology**

Introduction

Makoto Kawai, a prominent inventor based in Gunma, Japan, has made significant strides in the realm of materials science and semiconductor technology. With an impressive portfolio of 53 patents, Kawai's work primarily focuses on the innovation and production of composite wafers, specifically those involving oxide single-crystal films.

Latest Patents

Among Kawai's latest innovations is a patent detailing a method for producing a composite wafer that incorporates an oxide single-crystal film. This film is typically composed of lithium tantalate or lithium niobate, and the resulting composite wafer is designed to be resistant to cracking or peeling at the lamination interface between the film and the support wafer. The method includes several critical steps: the implantation of hydrogen atom ions or molecule ions from the surface of the oxide wafer to generate an ion-implanted layer, surface activation treatment of either the oxide wafer or the support wafer, bonding the treated surfaces to form a laminate, and subsequently heat-treating the laminate at temperatures of 90°C or higher to prevent cracking. Finally, the laminate is exposed to visible light to facilitate separation along the ion-implanted layer, yielding the final composite wafer.

Career Highlights

Kawai has had a successful career, contributing to industry-leading companies, including Shin-Etsu Chemical Co., Ltd. His work at these organizations has played a pivotal role in advancing wafer production technologies, enhancing the performance and durability of semiconductor devices.

Collaborations

Throughout his career, Kawai has collaborated with esteemed colleagues such as Shoji Akiyama and Yoshihiro Kubota. These collaborations have undoubtedly enriched his research and innovation efforts, leading to the development of groundbreaking technologies in the field.

Conclusion

Makoto Kawai is a driving force in the innovation of composite wafer technology. His extensive patent portfolio and collaborative endeavors highlight his significant contributions to the industry, ensuring the continued advancement of materials science and semiconductor manufacturing. Kawai's work not only demonstrates his expertise but also sets a foundation for future innovations in this essential area.