Location History:
- Santa Clara, CA (US) (1997 - 2015)
- Fremont, CA (US) (2008 - 2016)
- San Jose, CA (US) (2020)
- Pleasanton, CA (US) (2023)
Company Filing History:
Years Active: 1997-2023
Title: Lumin Li: Innovator in Plasma Processing Technology
Introduction: Lumin Li is an accomplished inventor based in Santa Clara, California, with a remarkable portfolio of 33 patents. His innovations primarily focus on advanced plasma processing systems, contributing significantly to the efficiency and capabilities of semiconductor manufacturing.
Latest Patents: Among Lumin Li's latest inventions is the "Multi Zone Gas Injection Upper Electrode System." This innovative plasma processing system features a plasma chamber that includes a substrate support and a multi-zone gas injection upper electrode situated opposite the substrate support. The invention defines an inner plasma region between the upper electrode and the substrate support, consisting of several concentric gas injection zones. The design is complemented by a confinement structure that surrounds the inner plasma region, enhancing the control and efficiency of plasma interactions during processing.
Another notable patent is the "System and Method of Plasma Processing," which encompasses a plasma chamber and a controller coupled to the chamber. Similar to his first invention, this system also utilizes concentric gas injection zones within the upper electrode, further supporting the advancement of plasma processing technology.
Career Highlights: Lumin Li's career has seen him work with prominent companies in the semiconductor industry, including Lam Research Corporation and Varian Associates, Inc. His contributions to these organizations have solidified his reputation as a leading figure in the field of plasma processing.
Collaborations: Throughout his career, Lumin has collaborated with esteemed professionals such as Rajinder Dhindsa and Eric H. Lenz. These partnerships have not only enriched his research and development work but have also fostered a collaborative spirit that enhances innovation within the industry.
Conclusion: With a total of 33 patents and ongoing contributions to plasma processing technologies, Lumin Li exemplifies the spirit of innovation within the semiconductor field. His work is a testament to the impact that dedicated inventors can have on advancing technology and industry practices. Lumin's inventions continue to pave the way for future developments, reinforcing the importance of collaboration and ingenuity in scientific progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.