The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Jan. 17, 2007
Rajinder Dhindsa, San Jose, CA (US);
Eric H. Lenz, Pleasanton, CA (US);
Andy W. Desepte, San Jose, CA (US);
Lumin LI, Santa Clara, CA (US);
Rajinder Dhindsa, San Jose, CA (US);
Eric H. Lenz, Pleasanton, CA (US);
Andy W. DeSepte, San Jose, CA (US);
Lumin Li, Santa Clara, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A plasma processing chamber includes a cantilever assembly configured to neutralize atmospheric load. The chamber includes a wall surrounding an interior region and having an opening formed therein. A cantilever assembly includes a substrate support for supporting a substrate within the chamber. The cantilever assembly extends through the opening such that a portion is located outside the chamber. The chamber includes an actuation mechanism operative to move the cantilever assembly relative to the wall.