Rajinder Dhindsa

Title: Rajinder Dhindsa: Pioneering Ion Energy Distribution Functions

Introduction:

Rajinder Dhindsa is a highly accomplished inventor, hailing from San Jose, California. With an impressive patent count of 179, Dhindsa has made significant contributions in the field of creating ion energy distribution functions (IEDF) through his groundbreaking inventions and innovative methods. This article will shed light on his latest patents, career highlights, notable collaborations, and the impact of his work in the industry.

Latest Patents:

Dhindsa's recent patents revolve around the creation of arbitrarily-shaped ion energy distribution functions using a technique called shaped-pulse-bias. In one embodiment, he developed a method that involves applying positive and negative jump voltages to an electrode in a process chamber to neutralize and set the voltage of a wafer respectively. By modulating the amplitude of the wafer voltage, a predetermined number of pulses are produced to determine the ion energy distribution function.

Another patent focuses on a feedback loop for controlling a pulsed voltage waveform. This innovation allows for the maintenance of a nearly constant sheath voltage, resulting in the creation of a mono-energetic IEDF at the substrate's surface. Consequently, this system provides precise control over the shape of the IEDF and the feature profiles formed on the substrate.

Career Highlights:

Throughout his career, Rajinder Dhindsa has held notable positions at renowned companies in the industry, including Lam Research Corporation and Applied Materials, Inc. At these organizations, he has demonstrated his expertise in the field of ion energy distribution functions and advanced semiconductor processing.

Collaborations:

Dhindsa's work in the field of ion energy distribution functions has garnered attention and collaborations with esteemed professionals. Notably, he has collaborated with Alexei Marakhtanov and James Rogers, two industry experts who have contributed significantly to the development of semiconductor processes and related technologies. These collaborations have fostered a fruitful exchange of ideas, leading to further advancements in the field.

Conclusion:

Rajinder Dhindsa's extensive patent portfolio and expertise in creating ion energy distribution functions have cemented his position as a pioneering figure in the world of semiconductor processing. Through his latest patents, his inventions aim to revolutionize the control and shaping of IEDFs, enabling more precise and efficient processes in the semiconductor industry. Dhindsa's career highlights and collaborations reflect his commitment to innovation and his remarkable contributions to the field.