Company Filing History:
Years Active: 1995-2001
Title: The Innovative Mind of Lai-Juh Chen
Introduction
Lai-Juh Chen is a prominent inventor based in Hsin-Chu, Taiwan, who has made significant contributions to the field of technology with a portfolio of 20 patents. His inventions primarily focus on improving materials and processes within semiconductor manufacturing, reflecting his commitment to innovation and excellence.
Latest Patents
Among Lai-Juh Chen's latest inventions is a patent for "Sidewall protection for a via hole formed in a photosensitive, low dielectric constant layer." This groundbreaking method allows for the formation of via holes in insulator layers without the conventional use of photoresist procedures. By using a photosensitive, low dielectric constant layer as an interlevel insulator, the method employs direct exposure techniques to create regions that are waterproof to specific solutions, allowing selective removal to achieve the desired via hole structure. Moreover, he has developed a method to improve the roughness of metal deposition on low-k material, specifically targeting the enhancement of the TaN barrier layer utilized in dual damascene structures through innovative e-beam exposure techniques.
Career Highlights
Lai-Juh Chen is associated with the Industrial Technology Research Institute, where he has played a pivotal role in advancing research and development in semiconductor technologies. His innovative techniques have been integral in improving fabrication processes, making them more efficient and effective.
Collaborations
Throughout his career, Lai-Juh Chen has worked closely with talented colleagues, including Chien-Mei Wang and Hung-Wen Chiou. Their collaborative efforts have propelled new inventions and advancements in semiconductor technology, showcasing the importance of teamwork in research and innovation.
Conclusion
Lai-Juh Chen's dedication to pushing the boundaries of technology through his inventive spirit and collaboration with fellow researchers stands as a testament to his impact in the field. With a robust patent portfolio emphasizing innovative solutions in semiconductor manufacturing, he continues to inspire the next generation of inventors and researchers.