Nirasaki, Japan

Koji Maekawa


Average Co-Inventor Count = 3.1

ph-index = 3

Forward Citations = 23(Granted Patents)


Location History:

  • Yamanashi, JP (2017 - 2021)
  • Nirasaki, JP (2010 - 2023)

Company Filing History:


Years Active: 2010-2023

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15 patents (USPTO):

Title: **Koji Maekawa: Innovator in Film-Forming Technology**

Introduction

Koji Maekawa, an accomplished inventor based in Nirasaki, Japan, has made significant contributions to the field of film-forming technology. With a remarkable portfolio of 15 patents, Maekawa's work continues to influence advancements within the industry.

Latest Patents

Among his latest innovations, Maekawa has developed a tungsten film-forming method, which includes a comprehensive process for creating tungsten films on substrates. This method involves forming a silicon film in a reduced pressure atmosphere, producing an initial tungsten film using tungsten chloride gas, and subsequently forming a main tungsten film with a tungsten-containing gas. Additionally, he has introduced a film-forming system that optimizes the substrate preparation process, ensuring high-quality film formation through layers that manage the orientation of base films.

Career Highlights

Maekawa's professional journey has been marked by his association with Tokyo Electron Limited, a leading company in the semiconductor and electronics sector. His expertise in the field has placed him at the forefront of innovations that enhance the functionality and application of semiconductor devices.

Collaborations

Throughout his career, Koji Maekawa has collaborated with esteemed colleagues, including Takashi Sameshima and Takanobu Hotta. These partnerships highlight the importance of teamwork in driving technological advancements and exemplify the shared commitment to research and development within the company.

Conclusion

Koji Maekawa's contributions to film-forming technology underscore his role as a prominent inventor in Japan's technological landscape. His latest patents demonstrate not only his innovative spirit but also his dedication to advancing the capabilities of modern electronic devices. Through continuous collaboration and research, Maekawa remains a vital figure in the evolution of semiconductor technology.

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