Ko-Feng Chen

Title: Innovations of Ko-Feng Chen in Semiconductor Technology

Introduction

Ko-Feng Chen is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on enhancing the performance and efficiency of semiconductor devices through innovative dielectric structures.

Latest Patents

One of his latest patents is titled "Dielectric structures in semiconductor devices." This patent discloses a semiconductor device featuring densified dielectric structures and outlines a method for fabricating the same. The method involves forming a fin structure, creating an isolation structure adjacent to the fin structure, and establishing a source/drain (S/D) region on the fin structure. It also includes depositing a flowable dielectric layer on the isolation structure, converting it into a non-flowable dielectric layer, and performing a densification process. This process is repeated to create a stack of densified dielectric layers surrounding the S/D region.

Another notable patent is "Semiconductor structure and method of manufacturing the same." This patent describes a semiconductor structure that includes a semiconductor substrate and an isolation structure within the substrate. The isolation structure consists of a first dielectric layer in contact with the semiconductor substrate and a second dielectric layer positioned over the first. The first dielectric layer has a bottom portion and a sidewall portion, with the thickness of the bottom portion being greater than that of the sidewall portion.

Career Highlights

Ko-Feng Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to push the boundaries of semiconductor technology and contribute to advancements in the field.

Collaborations

Throughout his career, Ko-Feng Chen has collaborated with notable colleagues, including Keng-Chu Lin and Mrunal Abhijith Khaderbad. These collaborations have further enriched his research and development efforts in semiconductor innovations.

Conclusion

Ko-Feng Chen's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a key inventor in the industry. His work continues to influence the development of advanced semiconductor devices, showcasing the importance of innovation in technology.