Location History:
- Laurel, MD (US) (2003 - 2008)
- Ludwigshafen, DE (2007 - 2009)
- Heppenheim, DE (2007 - 2015)
- Lorsch, DE (2012 - 2024)
Company Filing History:
10 out of 1,405 
8 out of 83 
5 out of 9 
Years Active: 2003-2025
Title: Innovations of Klaus Edinger: A Pioneer in Photolithography
Introduction
Klaus Edinger, an accomplished inventor based in Lorsch, Germany, has made significant contributions to the field of photolithography, evidenced by his impressive portfolio of 30 patents. His innovative approaches and methods have garnered attention in the tech industry, particularly in applications related to optical elements and semiconductor manufacturing.
Latest Patents
Among his recent patents, Edinger has developed a method and apparatus for disposing of excess material from photolithographic masks. This process involves several steps: enlarging the surface of the excess material, using a scanning probe microscope's probe to displace it on the mask, and finally, removing the displaced material. Another notable innovation is his apparatus and method for removing single particulates from substrates, particularly in extreme ultraviolet (EUV) photolithography. This invention includes an analysis unit capable of determining the material composition of a particulate and a gas injection system that aids in its removal.
Career Highlights
Klaus Edinger has worked with renowned companies in the photonic and semiconductor sectors, notably Carl Zeiss SMT GmbH and Carl Zeiss SMS Ltd. His roles in these organizations have allowed him to explore groundbreaking technologies and develop solutions that address critical industry challenges, particularly in mask manufacturing and particulate contamination.
Collaborations
Throughout his career, Edinger has collaborated with talented professionals like Thorsten Hofmann and Michael Budach. These partnerships have enabled him to combine expertise and drive innovation forward, enhancing the quality and effectiveness of his inventions.
Conclusion
Klaus Edinger stands as a pivotal figure in the photolithography field, with a robust portfolio that reflects his commitment to innovation. His contributions have not only advanced the technology used in semiconductor manufacturing but have also established him as a respected inventor whose work continues to impact the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.