The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Dec. 21, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Christof Baur, Darmstadt, DE;
Klaus Edinger, Lorsch, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/04 (2010.01); G01Q 10/00 (2010.01); G01Q 10/06 (2010.01); G01Q 70/14 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/045 (2013.01); G01Q 10/00 (2013.01); G01Q 10/06 (2013.01); G01Q 10/065 (2013.01); G01Q 70/14 (2013.01);
Abstract
The invention relates to a scanning probe microscope, having: (a) a scanning device for scanning a measurement tip over a surface; (b) a cantilever for the measurement tip, wherein the cantilever has a torsion region; (c) wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and (d) a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip.