Location History:
- Yamanashi-ken, JP (1998 - 1999)
- Nakakoma-gun, JP (2004)
- Nirasaki, JP (2009 - 2013)
- Yamanashi, JP (2008 - 2017)
Company Filing History:
14 out of 10,295 
1 out of 71 
1 out of 373 
Years Active: 1998-2017
Title: Kimihiro Higuchi: A Pioneer in Plasma Processing Innovations
Introduction: Kimihiro Higuchi is a notable inventor based in Nirasaki, Japan, known for his significant contributions to the field of semiconductor processing. With a remarkable portfolio comprising 15 patents, Higuchi has established himself as a leading figure in the advancement of plasma processing technologies.
Latest Patents: Among Higuchi's latest innovations is the plasma processor and plasma processing method. This invention features an etching chamber that incorporates a focus ring surrounding a semiconductor wafer positioned on a lower electrode. The design includes an electric potential control DC power supply that regulates the potential of the focus ring. Specifically, the lower electrode is supplied with a DC voltage ranging from -400 to -600 V to effectively manage the potential of the focus ring. This innovative configuration aims to prevent surface arcing along the substrate's surface during processing, demonstrating Higuchi's commitment to enhancing the reliability and efficiency of semiconductor fabrication.
Career Highlights: Kimihiro Higuchi has made substantial contributions to the semiconductor industry through his work with notable companies such as Tokyo Electron Limited and Tokyo Electron Yamanashi Limited. His expertise in plasma processing has positioned him at the forefront of technological advancements in this critical area of electronics.
Collaborations: Throughout his career, Higuchi has collaborated with esteemed colleagues like Akihiro Kikuchi and Satoshi Kayamori, further enhancing the collaborative spirit within the research and development community focused on innovative technologies. Their combined efforts reflect a commitment to pushing the boundaries of semiconductor processing.
Conclusion: Kimihiro Higuchi stands out as an influential inventor whose work has significantly impacted plasma processing methodologies. His extensive patent portfolio and collaborations within the industry highlight his role as a driving force behind advancements in semiconductor technologies. Higuchi's continued innovations promise to shape the future of electronics and manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.