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Nirasaki, Japan

Tokyo Electron Yamanashi Limited

USPTO Granted Patents = 71

Forward Citations = 5,463

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137 inventors (with patents filed for the assignee):

Shigeki Tozawa (6 out of 13 patents)

Kazuo Fukasawa (5 out of 9 patents)

Shunichi Iimuro (5 out of 6 patents)

4. Hisashi Nakajima (5 out of 7 patents)

5. Satoru Yamashita (4 out of 15 patents)

6. Chishio Koshimizu (4 out of 163 patents)

7. Eiichi Nishimura (4 out of 84 patents)

8. Haruhiko Yoshioka (4 out of 15 patents)

9. Shozo Hosoda (4 out of 4 patents)

10. Masashi Arasawa (4 out of 4 patents)

11. Yoshikazu Ito (4 out of 4 patents)

12. Tutomu Hiroki (4 out of 4 patents)

13. Hiroshi Nishikawa (3 out of 58 patents)

14. Kazuya Nagaseki (3 out of 71 patents)

15. Yoshio Fukasawa (3 out of 6 patents)

Core Competencies:

Plasma Processing

Sputtering Method

Anisotropic Etching

Probe Apparatus

Electrostatic Chuck

Vacuum Processing

Multi-Chamber System

Electron Beam Excited Plasma

Testing Apparatus

Thin Film Formation

Substrate Alignment

Integrated Circuit Testing

71 patents: Sort by Forward Citations

1. 6162323 - Plasma processing apparatus (2000-12-19),

2. 6149760 - Plasma processing apparatus (2000-11-21),

3. 6110287 - Plasma processing method and plasma processing apparatus (2000-08-29),

4. 6101970 - Plasma processing apparatus (2000-08-15),

5. 6096176 - Sputtering method and a sputtering apparatus thereof (2000-08-01),

6. 6079357 - Plasma processing apparatus (2000-06-27),

7. 6074518 - Plasma processing apparatus (2000-06-13),

8. 5980767 - Method and devices for detecting the end point of plasma process (1999-11-09),

9. 5958258 - Plasma processing method in semiconductor processing system (1999-09-28),

10. 5804983 - Probe apparatus with tilt correction mechanisms (1998-09-08),

11. 5779803 - Plasma processing apparatus (1998-07-14),

12. 5766498 - Anisotropic etching method and apparatus (1998-06-16),

13. 5728253 - Method and devices for detecting the end point of plasma process (1998-03-17),

14. 5717294 - Plasma process apparatus (1998-02-10),

15. 5708222 - Inspection apparatus, transportation apparatus, and temperature control (1998-01-13),

Tokyo Electron Yamanashi Limited is a subsidiary of Tokyo Electron Limited. The company specializes in the development, production, and sales of semiconductor manufacturing equipment. With their advanced technology, Tokyo Electron Yamanashi Limited strives to contribute to the development of the global semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

71 Patents

#1 in Nirasaki

#1,362 in Japan

#10,076 in the World

Nirasaki, Japan

Tokyo Electron Yamanashi Limited

Forward Citations = 5,463

137 inventors:

Shigeki Tozawa (6 out of 13 patents)

Kazuo Fukasawa (5 out of 9 patents)

Shunichi Iimuro (5 out of 6 patents)

4. Hisashi Nakajima (5 out of 7 patents)

5. Satoru Yamashita (4 out of 15 patents)

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